High-efficiency silicon metasurface mirror on a sapphire substrate

verfasst von

Mariia Matiushechkina, Andrey B. Evlyukhin, Vladimir A. Zenin, Michèle Heurs, Boris N. Chichkov

Abstract

For a possible implementation of high-efficiency Si-nanosphere metasurface mirrors functioning at telecom wavelengths in future gravitational wave detectors, exact dimensional and configuration parameters of the total system, including substrate and protective coating, have to be determined a priori. The reflectivity of such multi-layer metasurfaces with embedded Si nanoparticles and their potential limitations need to be investigated. Here we present the results on how the substrate and protective layer influence optical properties and demonstrate how dimensional and material characteristics of the structure alter light reflectivity. Additionally, we consider the impact of manufacturing imperfections, such as fluctuations of Si nanoparticle sizes and their exact placement, on the metasurface reflectivity. Finally, we demonstrate how high reflectivity of the system can be preserved under variations of the protective layer thickness, incident angle of light, and its polarization.

Organisationseinheit(en)

PhoenixD: Simulation, Fabrikation und Anwendung optischer Systeme
Institut für Gravitationsphysik
Institut für Quantenoptik
QuantumFrontiers

Externe Organisation(en)

University of Southern Denmark

Typ

Artikel

Journal

Optical materials

Band

138

ISSN

0925-3467

Publikationsdatum

04.2023

Publikationsstatus

Veröffentlicht

Peer-reviewed

Ja

ASJC Scopus Sachgebiete

Elektronische, optische und magnetische Materialien, Atom- und Molekularphysik sowie Optik, Elektrotechnik und Elektronik, Spektroskopie, Anorganische Chemie, Physikalische und Theoretische Chemie, Organische Chemie

Elektronische Version(en)

https://doi.org/10.1016/j.optmat.2023.113618 (Zugang: Offen)