Focus-based automated alignment for laser direct writing

verfasst von

Reinhard Caspary, Lei Zheng, Axel Günther, Bernhard Roth

Abstract

We aim to integrate two-photon polymerization (TPP) in a fully digitalized and automated workflow for micro- and nanooptics production. This requires linking the coordinate system of the writing laser scanner to the geometry of the sample or previously fabricated structures on the sample. We developed a fast layer detection algorithm, which determines the axial position and the tilt angles of both interface planes of the photosensitive material using the integrated microscope camera of the TPP system. Furthermore, we identify the shear angles between the camera and the lateral scanner axes. The individual measurement results are stored and accessible via direct-written identification QR code on the sample itself. This is an important step towards an individualized automatic workflow based on digital twins.

Organisationseinheit(en)

PhoenixD: Simulation, Fabrikation und Anwendung optischer Systeme
Hannoversches Zentrum für Optische Technologien (HOT)

Externe Organisation(en)

Technische Universität Braunschweig

Typ

Aufsatz in Konferenzband

Publikationsdatum

07.08.2023

Publikationsstatus

Veröffentlicht

Peer-reviewed

Ja

ASJC Scopus Sachgebiete

Elektronische, optische und magnetische Materialien, Physik der kondensierten Materie, Angewandte Informatik, Angewandte Mathematik, Elektrotechnik und Elektronik

Elektronische Version(en)

https://doi.org/10.1117/12.2675821 (Zugang: Geschlossen)