UV-LED-based projection lithography for rapid high-resolution micro- and nanostructuring

verfasst von

Lei Zheng, Carsten Reinhardt, Bernhard Roth

Abstract

The demand on the miniaturization of products has fostered the advancement of high-resolution fabrication technologies. Here, we demonstrate a simple and low-cost UV-LED-based lithography technique for structuring at micro- and nanoscale. The corresponding experimental setup was established with off-the-shelf components and allows for single structuring within seconds based on a standard microscope projection photolithography (MPP) process. Single lines with feature sizes down to 150 nm were successfully produced. In addition, high-resolution gratings, ring resonators as well as arrayed waveguide gratings at the micro- and nanoscale were successfully fabricated as well. This operation-friendly, highly efficient and low-cost approach exhibits great potential in micro- and nanomanufacturing for applications in fields such as nanophotonics, biophotonics and micro- and nanoelectromechanical systems.

Organisationseinheit(en)

PhoenixD: Simulation, Fabrikation und Anwendung optischer Systeme
Hannoversches Zentrum für Optische Technologien (HOT)

Externe Organisation(en)

Hochschule Bremen

Typ

Aufsatz in Konferenzband

Anzahl der Seiten

6

Publikationsdatum

03.10.2023

Publikationsstatus

Veröffentlicht

Peer-reviewed

Ja

ASJC Scopus Sachgebiete

Elektronische, optische und magnetische Materialien, Physik der kondensierten Materie, Angewandte Informatik, Angewandte Mathematik, Elektrotechnik und Elektronik

Elektronische Version(en)

https://doi.org/10.1117/12.2677495 (Zugang: Geschlossen)