UV-LED projection photolithography for high-resolution functional photonic components
- verfasst von
- Lei Zheng, Urs Zywietz, Tobias Birr, Martin Duderstadt, Ludger Overmeyer, Bernhard Roth, Carsten Reinhardt
- Abstract
The advancement of micro- and nanostructuring techniques in optics is driven by the demand for continuous miniaturization and the high geometrical accuracy of photonic devices and integrated systems. Here, UV-LED projection photolithography is demonstrated as a simple and low-cost approach for rapid generation of two-dimensional optical micro- and nanostructures with high resolution and accuracy using standard optics only. The developed system enables the projection of structure patterns onto a substrate with 1000-fold demagnification. Photonic devices, e.g., waveguides and microring resonators, on rigid or flexible substrates with varied geometrical complexity and overall structure dimensions from the nanometer to centimeter scale were successfully prepared. In particular, high-resolution gratings with feature sizes down to 150 nm and periods as small as 400 nm were realized for the first time by this approach. Waveguides made of doped laser active materials were fabricated, and their spontaneous emission was detected. The demonstrated superior performance of the developed approach may find wide applications in photonics, plasmonics, and optical materials science, among others.
- Organisationseinheit(en)
-
PhoenixD: Simulation, Fabrikation und Anwendung optischer Systeme
Hannoversches Zentrum für Optische Technologien (HOT)
Institut für Transport- und Automatisierungstechnik
- Externe Organisation(en)
-
Laser Zentrum Hannover e.V. (LZH)
Hochschule Bremen
- Typ
- Artikel
- Journal
- Microsystems and Nanoengineering
- Band
- 7
- Publikationsdatum
- 17.08.2021
- Publikationsstatus
- Veröffentlicht
- Peer-reviewed
- Ja
- ASJC Scopus Sachgebiete
- Atom- und Molekularphysik sowie Optik, Werkstoffwissenschaften (sonstige), Physik der kondensierten Materie, Wirtschaftsingenieurwesen und Fertigungstechnik, Elektrotechnik und Elektronik
- Elektronische Version(en)
-
https://doi.org/10.1038/s41378-021-00286-7 (Zugang:
Offen)
