Magnetron sputter deposition of Ta₂O₅-SiO₂ quantized nanolaminates

verfasst von

S. Schwyn Thöny, M. Bärtschi, M. Batzer, M. Baselgia, S. Waldner, M. Steinecke, H. Badorreck, A. Wienke, M. Jupé

Abstract

Quantized nanolaminates are a type of optical metamaterials, which were discovered only recently. Their feasibility was demonstrated by atomic layer deposition and ion beam sputtering so far. In this paper, we will report on the successful magnetron sputter deposition of quantized nanolaminates based on Ta₂O₅-SiO₂. We will describe the deposition process, show results and material characterization of films deposited in a very wide parameter range. Furthermore, we will show how quantized nanolaminates deposited by magnetron sputtering were used in optical interference coatings such as antireflection and mirror coatings.

Organisationseinheit(en)

PhoenixD: Simulation, Fabrikation und Anwendung optischer Systeme

Externe Organisation(en)

Evatec AG
RhySearch
Laser Zentrum Hannover e.V. (LZH)

Typ

Artikel

Journal

Optics express

Band

31

Seiten

15825-15835

Anzahl der Seiten

11

ISSN

1094-4087

Publikationsdatum

26.04.2023

Publikationsstatus

Veröffentlicht

Peer-reviewed

Ja

ASJC Scopus Sachgebiete

Atom- und Molekularphysik sowie Optik

Elektronische Version(en)

https://doi.org/10.1364/OE.487892 (Zugang: Offen)