High-Resolution Optical Broadband Monitoring for the Production of Miniaturized Thin-Film Filters

authored by

F. Carstens, H. Ehlers, S. Schlichting, L. Jensen, Detlev Ristau

Abstract

To increase the accuracy of layer thicknesses in the production of miniaturized thin-film filters controlled by optical broadband monitoring, a high-resolution monitoring system was developed and evaluated by coating simulations and experiments.

Organisation(s)

PhoenixD: Photonics, Optics, and Engineering - Innovation Across Disciplines

External Organisation(s)

Laser Zentrum Hannover e.V. (LZH)

Type

Conference contribution

No. of pages

3

Publication date

2019

Publication status

Published

Peer reviewed

Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials, Mechanics of Materials

Electronic version(s)

https://doi.org/10.1364/OIC.2019.WA.7 (Access: Closed)