Embossing Nanostructures

authored by: D. Schmiele, R. Krimm, B. A. Behrens
Abstract: At present, optical components are costly and complex to manufacture. The costs often are a decisive factor in developing and manufacturing of optical components and sensors. The goal of the cluster of excellence PhoenixD, a major cross-disciplinary initiative, is the time- and cost-efficient production of optical systems. One promising approach is the accurate molding of micro- and nanostructures in a precisely controllable embossing process. Embossing as a manufacturing process for structured functional surfaces enables high output rates at low costs per component. However, embossing of micro- and nanostructures in particular requires high demands concerning the precision of the used machines and tools as well as on the precision of the positioning accuracy of actuated active parts. Machine- and tool-related disturbances are often unavoidable—these include guide inaccuracies, bearing clearances or temperature-related expansions in the powertrain. All these effects can be counteracted by means of an active process control. For this reason an embossing device is being developed which enables the die to be positioned precisely so that micro- and nanostructures can be transferred reproducibly with a high quality. In addition to the high positioning accuracy, this embossing device should also provide high embossing forces. This leads to an expansion of the material spectrum in microembossing and enables a variety of new applications. In this paper various concepts are presented and analyzed concerning their suitability for the precise embossing of fine structures by means of multi-body-simulation with regard to their deformation under load. In addition, a test bench of an electromagnet-spring system is introduced.
Organisation(s): Institute of Metal Forming and Metal Forming Machines
PhoenixD: Photonics, Optics, and Engineering - Innovation Across Disciplines
Type: Contribution to book/anthology
Pages: 307-313
No. of pages: 7
Publication date: 02.02.2023
Publication status: Published
Peer reviewed: Yes
ASJC Scopus subject areas: Industrial and Manufacturing Engineering, Economics, Econometrics and Finance (miscellaneous), Safety, Risk, Reliability and Quality
Electronic version(s): https://doi.org/10.1007/978-3-031-18318-8_32 (Access: Closed)