Rapid micro- and nanostructuring by UV-LED-based microscope projection lithography

authored by

Lei Zheng, Carsten Reinhardt, Bernhard Roth

Abstract

A low-cost and simple UV-LED-based projection lithography approach enabling micro- and nanostructuring in seconds and with subwavelength resolution is demonstrated in this work.

Organisation(s)

PhoenixD: Photonics, Optics, and Engineering - Innovation Across Disciplines
Hannover Centre for Optical Technologies (HOT)

External Organisation(s)

Bremen University of Applied Sciences

Type

Paper

Publication date

04.06.2023

Publication status

Published

Peer reviewed

Yes

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics, Space and Planetary Science, Control and Systems Engineering, Electrical and Electronic Engineering, Instrumentation, General Computer Science, Electronic, Optical and Magnetic Materials