Automated Resin Layer Detection for Laser Direct Writing

authored by

Reinhard Caspary, Lei Zheng, Axel Günther, Bernhard Roth

Abstract

Placing the focus of a laser direct writing system inside a photosensitive layer is a time-consuming manual step. We present an automated layer detection algorithm with reproducible sub-µm resolution, allowing for real-time tilt correction.

Organisation(s)

PhoenixD: Photonics, Optics, and Engineering - Innovation Across Disciplines
Hannover Centre for Optical Technologies (HOT)

External Organisation(s)

Technische Universität Braunschweig

Type

Paper

Publication date

04.06.2023

Publication status

Published

Peer reviewed

Yes

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics, Space and Planetary Science, Control and Systems Engineering, Electrical and Electronic Engineering, Instrumentation, General Computer Science, Electronic, Optical and Magnetic Materials