Optical and Plasmonic Devices Realized by UV-LED-Based Projection Photolithography

authored by

Lei Zheng, Carsten Reinhardt, Bernhard Roth

Abstract

A simple and cost-effective UV-LED-based microscope projection lithography technique for the manufacturing of optical and plasmonic devices as well as their functionalities is demonstrated.

Organisation(s)

PhoenixD: Photonics, Optics, and Engineering - Innovation Across Disciplines
Hannover Centre for Optical Technologies (HOT)

External Organisation(s)

Bremen University of Applied Sciences

Type

Conference contribution

Publication date

2023

Publication status

Published

Peer reviewed

Yes

ASJC Scopus subject areas

Computer Networks and Communications, Electrical and Electronic Engineering, Atomic and Molecular Physics, and Optics

Electronic version(s)

https://doi.org/10.1109/OECC56963.2023.10209806 (Access: Closed)